High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect

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High aspect ratio silicon ring-shape micropillars fabricated by

PDF) Recent Advances in Reactive Ion Etching and Applications of

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Deep reactive ion etching - ScienceDirect

PDF) Metal assisted chemical etching for high aspect ratio

Figure 1 from Ultra Deep Reactive Ion Etching of High Aspect-Ratio

Enhanced metal assisted etching method for high aspect ratio

Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography